SLA Series- N2+O2/wet N2

Application:

It is mainly used for high temperature heat treatment process in N2+O2 or wet N2 atmosphere for product like DBC, copper slurry, Kovar pre-oxidation, MLCC, Decarbonization and etc.

Feature:

The advanced humidifying and oxidizing atmosphere system is controllable from dew point +10℃ to -10℃。

Mass flowmeter combined with atmosphere closed loop control can control the oxygen content in the same chamber.

The muffle structure is combined with the first class heating elements. The long-term usage temperature can reach 1150℃.

With automatic heating function, the temperature can be heated up step by step, so that the equipment can be effectively protected.

Option:

Industrial computer control system, online ultrasonic cleaning system, Ω flexible temperature profile wire. Dew point online analysis system, oxygen content online analysis system.